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tel: +86 18961535237
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email: sales@xivitech.com
Values
Customer Driven by Quality
We uphold high standards in design, manufacturing, and validation to ensure reliable and consistent performance in high-end applications.
Vision
To make precision technology more accessible and drive industrial automation toward higher accuracy and greater intelligence.
Mission
To build integrated solutions for ultra-precision wafer positioning, transfer, and storage—powered by precision motion control and advanced manufacturing capabilities—providing stable, reliable, and high-performance core support for semiconductor and high-end industrial equipment.
About us
XIVI is a technology-driven company specializing in precision motion control and semiconductor automation.
Leveraging nearly a decade of R&D expertise and in-house precision manufacturing capabilities, we provide integrated solutions for ultra-precision wafer positioning, transfer, and storage.
Our technologies support critical semiconductor processes, delivering high accuracy, reliability, and system stability for advanced manufacturing environments.
XIVI serves semiconductor equipment manufacturers and high-end automation industries worldwide, helping customers achieve higher precision, efficiency, and process stability.
XIVI
Wafer Handling Robots
Wafer handling robots enable automated wafer transfer and precise positioning inside semiconductor tools, supporting stable and reliable handling across atmospheric and vacuum environments.
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Precision Motion Stages
Precision motion stages provide high-accuracy positioning, scanning, and alignment for advanced equipment where stability, dynamic response, and low vibration are critical.
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ROBOT STR
5-axis semiconductor wafer handling robot with 2 independently controllable rotary arms. It can support wafer pickup of EFEM from2 FOUP to 3 FOUP. The robot has high precision and high rigidity.
ROBOT STR
ROBOT ZTR-W
XIVI's vacuum manipulators have a full link arm mechanism forhigher positioning accuracy. Adopting full closed-loop control and equipped with vacuum direct-drive motors, it has higher rotary accuracy and faster response time.
ROBOT ZTR-W
ROBOT VTR
The Atmospheric Wafer Transfer Robot (hereinafter referred to as the'Robot' ) is suitable for use in atmospheric clean room environments,and consists of ...
ROBOT VTR
ABXY
The ABXY-ZT4 series stage is an air-bearing, mechanical motionstage with six degrees of freedom. It is specially designed for back-channel exposure machine and wafer inspection, slicing,annealing and other demanding semiconductor industry design.
ABXY
VMS-V
The platform is engineered and manufactured to rigorous high-vacuum standards, maintaining stable and reliable operation in vacuum environments down to 5x10 Pa, thereby ensuring a solid foundation for high-precision experiments and production.
VMS-V
VMZT
The VMZT series stage is a mechanical motion stage with four degrees of freedom. Designed for the demanding semiconductor industry design associated with back-channel exposure machine sand wafer inspection.
VMZT
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