2015

XIVI was founded in Wuxi.
Launched the first ABXY 6-DOF air-bearing precision motion platform.

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2017

Initiated the R&D of automated wafer transfer systems.

2019

Completed in-house development of the three core components for wafer transfer systems: Robot, Load Port, and Aligner.

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2021

Established a subsidiary in Shanghai — Shanghai Bodu Technology Co., Ltd., primarily responsible for product R&D.

2022

Achieved batch delivery of self-developed motion stages for semiconductor metrology and inspection.
Cumulative shipments of air-bearing precision platforms ranked among the leading suppliers in China, and related motion units and transfer systems began scaling across precision manufacturing, optics, laser, and electronics industries.

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2023

Self-developed EFEM entered batch production and was deployed in front-end semiconductor manufacturing tools.
Completed Series A financing.

2024

Launched the ZTR vacuum wafer handling robot and the VMS-V vacuum motion stage.
Established a Shenzhen office to support regional sales and after-sales service.

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2025

Released AMR (Autonomous Mobile Robot) products.
Established a Beijing office for regional sales and service.
Established a manufacturing subsidiary in Nantong. Today, XIVI operates manufacturing bases in Wuxi and Nantong, with a total cleanroom area of approximately 30,000 m².

Future

Looking ahead, we will continue to focus on the advanced semiconductor manufacturing. Meanwhile, we will accelerate the integration of core motion control technologies with AI, and continue expanding applications in AI computing, optical communication, HBM, and GPU-related industries.

Over the longer term, XIVI will explore extending precision technologies from industrial manufacturing to broader application scenarios, bringing advanced technologies closer to more industries and everyday life.

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History

Company Milestones