ZTR-Robot

In a wafer vacuum transfer system, XIVI’s vacuum wafer handling robot adopts a fully linked arm mechanism to achieve high positioning accuracy. With full closed-loop servo control and a vacuum direct-drive motor (DDM), it delivers superior rotational accuracy and faster dynamic response. The bidirectional dual-arm configuration provides extended reach without increasing the process chamber footprint, enabling higher throughput for multi-station wafer handling.

For high-vacuum wafer transfer applications where verified accuracy and repeatability are required, XIVI’s vacuum wafer handling robot offers high positioning repeatability and highly reliable vacuum partition performance.