A 5-axis single-arm semiconductor wafer handling robot featuring an integrated end-effector flipping mechanism.
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Specifications |
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STR |
Single-Arm |
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210 mm |
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Rated Payload |
0.5 kg |
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R axis |
Speed |
350 °/s |
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Range |
±170° |
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θ1 axis |
Speed |
250 °/s |
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Range |
±170° |
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θ2 axis |
Speed |
330 °/s |
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Range |
±160° |
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Z axis |
Speed |
440 mm/s |
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Range |
300 mm |
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Robot Weight |
25-30 kg |
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Cleanliness |
Class 1 |
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Repeatability |
±0.1 mm |
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Power Requirement |
Single phase AC 200V, 20A |
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*Rated payload refers to the weight of the wafer being transferred.