VTR-Robot

VTR-Robot

The atmospheric wafer transfer robot (hereafter robot) is designed for cleanroom operation and consists of a base, an arm, and an optional wafer end-effector (wafer fork). It transfers wafers using vacuum suction and/or clamping, driven by coordinated joint motions, including Z-axis lift, T-axis rotation, and R/W-axis extension/retraction.

description1
Zipper closure 1/4 zip athletic pullovers for men. Stretchy, lightweight, fast-drying fabric for superior performance. REGULAR FIT - US standard sizes. An athletic fit that sits close to the body for a wide range of motion, designed for optimal performance and all day comfort. FEATURES - Quarter zip closure;Thumbholes on long sleeves to keep them in place during workout
Specifications

Specifications

VTR

Single-Arm

Dual-Arm

143 mm / 176 mm

Rated Payload

0.5 kg

R/W axis

Speed

430 mm/s

T axis

Range

0° ~ 340°

T axis

Angular Speed

250 °/s

Z axis

Stroke

250 / 300 / 350 / 400 / 450 mm

Z axis

Speed

250 mm/s

Robot Weight

< 35 kg

Cleanliness

Class 1

Repeatability

±0.1 mm

Power Requirement

Single phase AC 200V, 20A

*The payload is the weight of the product being transferred.