STR-Robot

STR-Robot

A 5-axis semiconductor wafer handling robot featuring two independently controlled rotary arms. It supports wafer pick-and-place in EFEM systems with 2 to 3 FOUP load ports. The robot offers high precision and high stiffness.

description1
Zipper closure 1/4 zip athletic pullovers for men. Stretchy, lightweight, fast-drying fabric for superior performance. REGULAR FIT - US standard sizes. An athletic fit that sits close to the body for a wide range of motion, designed for optimal performance and all day comfort. FEATURES - Quarter zip closure;Thumbholes on long sleeves to keep them in place during workout
Specifications

Specifications

STR

Single-Arm

440 mm

Rated Payload

0.5 kg

R axis

Speed

350 °/s

Range

−130° ~ +310°

θ1 axis

Speed

260 °/s

Range

±165°

θ2 axis

Speed

330 °/s

Range

±165°

Z axis

Speed

550 mm/s

Range

480 mm

Robot Weight

76-80 kg

Cleanliness

Class 1

Repeatability

±0.05 mm

Power Requirement

Single phase AC 200V, 20A

*Rated payload refers to the weight of the wafer being transferred.