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VMZT

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VMZT

VMZT

The VMZT Series is a 4-DOF motion platform engineered for demanding  semiconductor back-end applications, including lithography-related processes and wafer inspection.

VMZT
VMZT
description1
Zipper closure 1/4 zip athletic pullovers for men. Stretchy, lightweight, fast-drying fabric for superior performance. REGULAR FIT - US standard sizes. An athletic fit that sits close to the body for a wide range of motion, designed for optimal performance and all day comfort. FEATURES - Quarter zip closure;Thumbholes on long sleeves to keep them in place during workout
Features

·The X and Y axes use high-rigidity, high-precision linear guides, delivering micron-level flatness and straightness during motion.

·Integrated ZT-axis with a compact, low-profile design, supporting 360° continuous rotation.

·The Z-axis design can remain unchanged.

Specifications

Specifications

Travel

Scan Axis

400mm, 550mm

 

Step Axis

400mm, 550mm

 

Z Axis 

4mm

 

Rz

±10°

Drive System

Linear Brushless Motor

Resolution

1 nm

Accuracy

< ±2 μm

Repeatability

< ±0.5 μm

XYZ Position Stability

±0.1 μm

Granite Bass Thickness

250 mm

Rated Payload (Maintaining Dynamic Specifications)

5 kg

Maximum Velocity with Rated payload

Scan Step Axis

700 mm/s

Peak Acceleration with Rated Payload

Scan Step Axis

0.7 G

Stiffness, First Natural Frequency with Rated Payload

 

> 100 Hz

 

Pitch / Yaw

X Axis

< ±3 arc sec

 

Y Axis

< ±4 arc sec

Straightness / Flatness

X Axis

< ±2 μm

 

Y Axis

< ±2 μm

 

Z Axis

< ±1.5 μm

XY Orthogonality

< 2 μm

Velocity ripple (sampled at 100 mm/s)

0.25%

Work Surface - Mounting Surface Parallelism

< 5 μm

MTBF

40,000 hours

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