The VXT series stage consists of linear cross roller bearings, linear motors, and a non-contact linear encoder. Adopting center-driven ironless motion, this series delivers zero cogging effect, ensuring smooth speed control and further enhancing operational efficiency. Platforms in this series feature excellent high-speed performance and high precision.
· High resolution of 1 nm, high positioning repeatability of 75 nm, and high positioning accuracy of 250 nm.
· Highly integrated X/Y linear motor nano-stage.
· Nanometer-level performance over a long travel range.
· Low motion error with strong stability and accuracy.
· Anti-creep characteristics.
· High dynamic performance enabled by direct-drive technology.
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Mechanical Specifications |
VXTI-060-N |
VXTI-060-P |
VXTI-110-N |
VXTI-110-P |
VXTI-160-N |
VXTI-160-P |
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Travel |
60 mm |
60 mm |
110 mm |
110 mm |
160 mm |
160 mm |
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Accuracy |
±2 μm |
±250 nm |
±3 μm |
±300 nm |
±4 μm |
±300 nm |
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Resolution |
1 nm |
1 nm |
1 nm |
1 nm |
1 nm |
1 nm |
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Repeatability(Bi-Directional) |
±100 nm |
±75 nm |
±100 nm |
±75 nm |
±100 nm |
±75 nm |
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Straightness &Flatness |
±0.75 μm |
±0.75 μm |
±0.75 μm |
±0.75 μm |
±1 μm |
±1 μm |
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Pitch |
10 arc sec |
10 arc sec |
10 arc sec |
10 arc sec |
10 arc sec |
10 arc sec |
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Yaw |
5 arc sec |
5 arc sec |
5 arc sec |
5 arc sec |
5 arc sec |
5 arc sec |
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Maximum Speed |
300 mm/s |
300 mm/s |
300 mm/s |
300 mm/s |
300 mm/s |
300 mm/s |
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Maximum Acceleration(No Load) |
10 m/s² |
10 m/s² |
10 m/s² |
10 m/s² |
10 m/s² |
10 m/s² |
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In–Position Stability |
<1 nm |
<1 nm |
<1 nm |
<1 nm |
<1 nm |
<1 nm |
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Maximum Force(Continuous) |
22 N |
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Load Capacity |
Horizontal |
10 kg |
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Side |
10 kg |
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Moving Mass |
1.5 kg |
1.5 kg |
2.0 kg |
2.0 kg |
2.5 kg |
2.5 kg |
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Stage Mass |
2.8 kg |
2.8 kg |
3.5 kg |
3.5 kg |
4.0 kg |
4.0 kg |
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Material |
Aluminum |
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MTBF |
20,000hrs |
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