·Excellent vacuum compatibility: Designed and manufactured to high-vacuum standards, ensuring stable and reliable operation down to 5 × 10⁻⁵ Pa, providing a solid foundation for high-precision experiments and manufacturing.
·Strong magnetic shielding: A carefully engineered magnetic shielding structure effectively suppresses magnetic interference and reduces the magnetic field at the working plane to an extremely low level, creating an ultra-low magnetic environment for precision processing and inspection.
·Outstanding dynamic performance: An optimized structural design delivers lightweight, agile motion while maintaining excellent stability, enabling efficient and smooth dynamic performance.
·Highly flexible customization: Customized options for travel range, dimensions, interfaces and more are available to meet specific application requirements, ensuring seamless integration into complex systems and enabling truly tailored solutions.
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Specifications |
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X Axis |
Y Axis |
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Travel |
400mm |
400mm |
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Repeatability |
±0.3 μm |
±0.3 μm |
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Maximum Velocity |
0.35 m/s |
0.35 m/s |
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Maximum Acceleration |
0.4 g |
0.4 g |
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Horizontal Straightness |
±1 μm |
±2 μm |
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Vertical Straightness |
±2 μm |
±2 μm |
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Pitch |
8 arcsec |
8 arcsec |
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Roll |
8 arcsec |
8 arcsec |
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Minimum Increment |
10 nm |
10 nm |
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Payload |
25 kg |
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Orthogonality |
< ±2 arcsec |
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Environment |
Vacuum, 5 × 10⁻⁵ Pa |
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Magnetic Field |
DC: 300 nT / AC: 20 nT |
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Cleanliness |
ISO Class 6 |
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Outgassing Rate |
< 3 × 10⁻⁶ Pa·m³/s |
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* The above specifications are customizable. For the latest information when considering a purchase, please contact our sales manager.