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ABXY

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ABXY

The ABXY-ZT4 Series is a 6-DOF hybrid air-bearing and mechanical motion platform engineered for the rigorous demands of back-end exposure, wafer inspection, dicing, and annealing.

ABXY

description1

Zipper closure 1/4 zip athletic pullovers for men. Stretchy, lightweight, fast-drying fabric for superior performance. REGULAR FIT - US standard sizes. An athletic fit that sits close to the body for a wide range of motion, designed for optimal performance and all day comfort. FEATURES - Quarter zip closure;Thumbholes on long sleeves to keep them in place during workout

Features

·X/Y axes use air bearings for smooth, frictionless motion

·T-Axis: micro-rotational adjustment for leveling

·Dual-drive stepper-driven axes with passive damping modules

·Z-Axis: fast, precise focus motion

Specifications

Specifications
Travel	Scan Axis	350mm, 500mm
	Step Axis	350mm, 500mm
	Z Axis	5mm
	Tip/Tilt Axis	±2mrad
	Rz	±3°
Drive System	T Axis	Linear Brushless Motor
Resolution	R Axis	< 1 nm
Accuracy	±200nm
Repeatability (choose linear drive)	±100nm (±50nm Optional)
XYZ Position Stability (Air On)	20 nm
Granite Bass Thickness	250 mm
Rated Payload (Maintaining Dynamic Specifications)	5 kg
Maximum Payload	10kg
Maximum Velocity with Rated payload	Scan Step Axis		400 mm/s
Peak Acceleration with Rated Payload	Scan Step Axis		1 G (10m/s)
RMS Acceleration with Rated Payload	Scan Step Axis		0.5 G (5m/s)
Stiffness, First Natural Frequency with Rated Payload	> 100 Hz
Pitch	2 arc sec
Roll	2 arc sec
Yaw	2 arc sec
XY straightness	1μm
XY Flatness	1.2μm
XY Orthogonality	< 2 arc sec
Velocity ripple (sampled at 400 mm/s)	0.1%
MTBF	20,000 hours