Load Port
Wafer Handling
| 特征 | |
 | Compatible with standard FOUP and Auto Door FOSB |
| Proprietary door system and precise motion control ensure high cleanliness |
| 选配 | |
 | E84 |
| Info pad pin and Lockout pin |
| Compatible with external I/O interfaces |
| Utilizes TCP/IP communication |
| Indicator lights can be customized |
| Compatible with 200mm/300mm wafers |
| Compatible with Barcode Reader and RF-ID Reader |
