VAG
Precision Control
XIVI’s VAG Series motion platform—born from years of investment in advanced materials, proprietary processing, and precision structural design—enables semiconductor equipment manufacturers to achieve high precision and throughput. Backed by strong IP and an elite R&D team, it meets the stringent demands of electronics and semiconductor processing and inspection.
 | Fast Scanning Speed |
| Linear Encoder Feedback |
| Minimal Settling Time |
| Air Bearing & Vacuum Preload |
